Microfabricaiton and characterization facilities

CENTRE OF EXCELLENCE IN MEMS & MICRO-FLUIDICS

GENERAL FACILITIES

Clean Room facilities of type ISO 6 and ISO 7,Semiconductor Wet Lab,Thin Film Deposition,UV exposure system,Electro-plating bath,High Resolution Micro-scope and Prog. Syringe Pumps.

MICROFABRICATION FACILITIES

Mask Aligner, UV Exposure System, DC and RF sputtering system, Electroplating work station, Oxidation Furnace, Programmable Spin coater, Dry Film Laminator System, Thermal Evaporation System, Thermal Compression System, Oxygen Plasma System.

CHARECTERIZATION FACILITIES

HD Optical Microscope, Fluorescence Spectrophotometer, Electro Chemical Workstation, Agilent LCR Meter, Data Acquisition/Switch Unit, Precision Source/Measure Unit, Hioki LCR Meter, TSE Programmable Microfluidics Syringe Pump, High Precision Weighing Balance, Oxygen Plasma System.

Our Instruments

user
DC RF Sputtering System
user
Thermal Evaporation
user
class 1000(Yellow room)